Distinctive and compact 3-axis precision movement platform, new from PI
Auburn, MA – PI, a world chief in precision movement management and nanopositioning merchandise releases a singular planar XY-Theta-Z nanopositioning stage primarily based on air bearings and direct drive motors. Not like typical multi-axis levels, the A-361 employs just one shifting platform shared amongst all three axes. One among its benefits is the ultra-low profile of solely 40mm, regardless of that includes an built-in vacuum chuck to accommodate wafers or different samples. Engineered as a parallel-kinematic multi-axis system, this stage delivers distinctive precision in a remarkably compact package deal.
Non-Contact, Upkeep-Free
By incorporating non-contact parts, it ensures frictionless operation, thereby providing not solely ultra-high precision but additionally superior efficiency and a very maintenance-free, just about infinite service life. The built-in position-locking functionality proves helpful for operations requiring utmost stability with zero servo jitter.
Clear-room Appropriate As a result of fully contact-free operation, and the shortage of lubricants, the XY-Theta stage is a superb match for clear room purposes.
6-DOF Improve If precision movement in 6 axes is required, the A-361 XY-Theta stage could be seamlessly built-in with the A-523 Z Tip/Tilt stage making a compact 6 levels of freedom nanopositioning system with solely 100mm whole peak. 6-axis nanopositioning programs are sometimes utilized in photonics alignment and semiconductor inspection purposes.
Extra data on the A-361 Low profile XY-Theta Air Bearing Multi-Axis Nanopositioning Stage
Industries Served Semiconductor take a look at and metrology, wafer inspection, photonics alignment, fiber positioning, optics alignment, flat display inspection, maskless lithography, and ultra-LED manufacturing. The noncontact design is right for cleanroom purposes.