Configurable, granite-based wafer-stage sub-system, new from PI.
Auburn, MA – PI, a world chief in nanopositioning and movement management, is providing granite-based multi-axis precision movement programs for the automation of wafer metrology, glass substrate inspection and lithography purposes. These extremely correct levels are primarily based on modular ideas that enable quick customizations. A number of applied sciences can be found together with air bearings, rails-on-granite, and several other varieties of piezo drive programs. Massive journey ranges of 1 meter and extra could be achieved with a wide range of totally different configurations. The XYZ-Theta instance stage proven is designed for skinny movie metrology geared up with direct drive motors, nanometer decision encoders, and high-performance ACS movement controllers.
PI’s superior design experience and lengthy expertise as a provider to high tier semiconductor producers and main system integrators allows us to know and meet the excessive calls for of the business, together with copy precisely and assembly strict cleanroom necessities.
Industries Served Semiconductors, photonics, optics, automation, metrology